JPH0516083B2 - - Google Patents

Info

Publication number

JPH0516083B2

JPH0516083B2 JP8294587A JP8294587A JPH0516083B2 JP H0516083 B2 JPH0516083 B2 JP H0516083B2 JP 8294587 A JP8294587 A JP 8294587A JP 8294587 A JP8294587 A JP 8294587A JP H0516083 B2 JPH0516083 B2 JP H0516083B2

Authority

JP

Japan

Prior art keywords

gap

thin film

magnetic

substrate

metal thin

Prior art date

1987-04-06

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Expired - Lifetime

Links

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• 239000010409 thin film Substances 0.000 claims description 66
• 239000000758 substrate Substances 0.000 claims description 60
• 230000005291 magnetic effect Effects 0.000 claims description 58
• 239000002184 metal Substances 0.000 claims description 54
• 230000005294 ferromagnetic effect Effects 0.000 claims description 17
• 239000010408 film Substances 0.000 claims description 8
• 239000011521 glass Substances 0.000 description 31
• 239000000463 material Substances 0.000 description 20
• 238000002844 melting Methods 0.000 description 13
• 230000008018 melting Effects 0.000 description 12
• 238000005520 cutting process Methods 0.000 description 9
• 238000004544 sputter deposition Methods 0.000 description 9
• 239000000696 magnetic material Substances 0.000 description 8
• 229910045601 alloy Inorganic materials 0.000 description 5
• 239000000956 alloy Substances 0.000 description 5
• 230000013011 mating Effects 0.000 description 5
• 229910000702 sendust Inorganic materials 0.000 description 4
• 125000006850 spacer group Chemical group 0.000 description 4
• 229910000859 α-Fe Inorganic materials 0.000 description 4
• 229910004298 SiO 2 Inorganic materials 0.000 description 3
• 238000004519 manufacturing process Methods 0.000 description 3
• 238000000034 method Methods 0.000 description 3
• 238000005498 polishing Methods 0.000 description 3
• 238000004804 winding Methods 0.000 description 3
• XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
• 230000015572 biosynthetic process Effects 0.000 description 2
• 239000000919 ceramic Substances 0.000 description 2
• 239000013078 crystal Substances 0.000 description 2
• 238000010586 diagram Methods 0.000 description 2
• 230000004907 flux Effects 0.000 description 2
• 238000005304 joining Methods 0.000 description 2
• 230000035699 permeability Effects 0.000 description 2
• 229910001047 Hard ferrite Inorganic materials 0.000 description 1
• BGPVFRJUHWVFKM-UHFFFAOYSA-N N1=C2C=CC=CC2=[N+]([O-])C1(CC1)CCC21N=C1C=CC=CC1=[N+]2[O-] Chemical compound N1=C2C=CC=CC2=[N+]([O-])C1(CC1)CCC21N=C1C=CC=CC1=[N+]2[O-] BGPVFRJUHWVFKM-UHFFFAOYSA-N 0.000 description 1
• 229910052786 argon Inorganic materials 0.000 description 1
• 239000002131 composite material Substances 0.000 description 1
• 239000000428 dust Substances 0.000 description 1
• 230000000694 effects Effects 0.000 description 1
• 238000005516 engineering process Methods 0.000 description 1
• 238000002474 experimental method Methods 0.000 description 1
• 239000007789 gas Substances 0.000 description 1
• 230000002265 prevention Effects 0.000 description 1
• 238000007790 scraping Methods 0.000 description 1